Fabrication and Functionalization of Nanochannels by Electron-Beam-Induced Silicon Oxide Deposition
نویسندگان
چکیده
منابع مشابه
Fabrication and functionalization of nanochannels by electron-beam-induced silicon oxide deposition.
We report on the fabrication and electrical characterization of functionalized solid-state nanopores in low stress silicon nitride membranes. First, a pore of approximately 50 nm diameter was drilled using a focused ion beam technique, followed by the local deposition of silicon dioxide. A low-energy electron beam induced the decomposition of adsorbed tetraethyl orthosilicate resulting in site-...
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The fabrication, characterization, and decoration with metallic nanoparticles of nanostructures such as nanowhiskers, nanodendrites, and fractal-like nanotrees on insulator substrates by electron-beam-induced deposition (EBID) are reviewed. Nanostructures with different morphologies of whiskers, dendrites, or trees are fabricated on insulator (Al2O3 or SiO2) substrates by EBID in transmission e...
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BACKGROUND Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface is dissociated in the focus of an electron beam. After 20 years of continuous development FEBID has reached a stage at which this technique is ...
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We present a technique to trim the resonance of silicon ring resonators. The cladding oxide is compacted by electron beam bombardment, causing strain in the silicon lattice, which leads to a 5 nm resonance shift.
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Free-standing tungsten-nanowhiskers about 3 nm in thickness were fabricated on SiO2 substrates with electron-beam induced deposition in a transmission electron microscope operated at 400 kV at room temperature. The growth process of the nanowhisker was observed in-situ and analyzed. The nanowhisker was characterized with high-resolution transmission electron microscopy. Nucleus-deposits smaller...
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ژورنال
عنوان ژورنال: Langmuir
سال: 2006
ISSN: 0743-7463,1520-5827
DOI: 10.1021/la061321c